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AGP21 series Capacitive Thin Film Vacuum Gauge
Location: Home > Flow Sensors
Technical Parameters

Power
15~30VDC
Range(Torr) 0~1,0~10,0~100,0~1000
Accuracy 
±0.3%Reading
Respond
≤60ms
Temperature effect 0.01%FS/℃ (zaro) 0.04%Reading/℃(Full range)
Connector
KF16(Not included in standard product)
Output  RS485、0~10VDC

Updating
  • Product Details
  • Graphic Details

1.Product Overview

The AGP21 series is a high-precision capacitive thin film vacuum gauge using Inconel material, resistant to corrosive process media, with high accuracy, fast response time, and long-term stability to meet the needs of today's critical process control applications.
The AGP21 series supports the switching of [Pa], [Torr] and [mbar] 3 common units, and is equipped with a standard KF16 pressure interface. Different adapters can be selected according to needs to ensure easy docking with various equipment and systems.
The accuracy, repeatability, response time and other indicators of AGP21 series are strictly tested before leaving the factory.
2.Application Scope

The AGP21 series is used in semiconductor, photovoltaic, petrochemical, vacuum sterilization, vacuum packaging, vacuum drying and other industries, especially for processes critical to the measurement requirements of low vacuum pressure, such as PECVD/ALD coating process, plasma etching and other processes.

3.Product Feature

Multiple ranges 0~1, 0~10, 0~100, 0~1000Torr

High accuracy

Modbus RTU/0~10V output

Long-term stability and reliability

TFT-LCD Dislay

Anti-corrosion