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1.Product Overview
The AS200 series gas mass flow controller are suitable for various conventional gases, improving the accuracy and reliability of gas mass flow control measurement results,with high repetitive accuracy up to ± 0.2% F.S; 1×1010Pa·m3/sec He low leakage rate and good airtightness ; They can support multiple signal outputs, including digital signals, 1-5V analog signals, and 4-20mA analog signals. They can use a single power supply (+15~+28VDC) and is suitable for different working scenarios; The standard open communication protocol provides convenience for customers to develop control and collection software themselves; At the same time, the products also provide powerful free client upper computer software, making them convenient for users to debug and operate.
2.Application Scope
? Digital, 1~5V, 4~20mA signal output available
? Use single power supply（+15～+28VDC）
? Support uto fault alarm, multi-gas and range measurement
3.Product Feature
The AS200 series gas mass flow controller (MFC) is mainly used for precise control and measurement of gas mass flow rate. AS200 plays an important role in scientific research and production in various fields such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, medicine, environmental protection, and vacuum. Its typical application scenarios include: integrated circuit process equipment, such as epitaxial, diffusion, plasma etching, sputtering, ion implantation, and various CVD devices; Other industry equipment, such as fiber optic melting, micro reaction devices, mixed gas distribution systems, gas sampling devices, capillary measuring instruments, gas chromatographs, and other analytical instruments.
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